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Proceedings Paper

Spectral ellipsometry of binary optic gratings
Author(s): Jaromir Pistora; Tomuo Yamaguchi; Jaroslav Vlcek; Jan Mistrik; Masahiro Horie; Vasilij Smatko; Eva Kovacova; Kamil Postava; Mitsuru Aoyama
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Paper Abstract

The coupled wave method (CWM) has been applied to the description of electromagnetic wave propagation in binary optic gratings. The electromagnetic field and the permittivity profile are expanded into two-fold Fourier series. The reflection coefficients of 2D periodical structures have been specified and the ellipsometric angles of discussed shapes have been computed. The theoretical results computed for SiO2 and Si3N4 dots are compared with experimental data obtained for the square silicon nitride dots on the Si substrate. The measurements were performed using computer controlled four zone null ellipsometer in spectral range from 240 nm to 700 nm. The influences of Si02 ultrathin oxidation layer and dot thickness on spectral ellipsometric angles are also discussed.

Paper Details

Date Published: 21 November 2003
PDF: 8 pages
Proc. SPIE 5259, 13th Polish-Czech-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, (21 November 2003); doi: 10.1117/12.545175
Show Author Affiliations
Jaromir Pistora, Shizuoka Univ. (Japan)
Technical Univ. Ostrava (Czech Republic)
Tomuo Yamaguchi, Shizuoka Univ. (Japan)
Jaroslav Vlcek, Technical Univ. Ostrava (Czech Republic)
Jan Mistrik, Shizuoka Univ. (Japan)
Masahiro Horie, Dainippon Screen Manufacturing Co., Ltd. (Japan)
Vasilij Smatko, Institute of Electrical Engineering (Slovak Republic)
Eva Kovacova, Institute of Electrical Engineering (Slovak Republic)
Kamil Postava, Technical Univ. Ostrava (Czech Republic)
Mitsuru Aoyama, Shizuoka Univ. (Japan)

Published in SPIE Proceedings Vol. 5259:
13th Polish-Czech-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics
Jerzy Nowak; Marek Zajac; Jan Masajada, Editor(s)

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