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Proceedings Paper

Residual stress and electromechanical properties of piezoelectric thin films on silicon substrates
Author(s): Kui Yao; Yen Peng Kong
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Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, ; doi: 10.1117/12.544774
Show Author Affiliations
Kui Yao, Institute of Materials Research and Engineering (Singapore)
Yen Peng Kong, Institute of Materials Research and Engineering (Singapore)


Published in SPIE Proceedings Vol. 5455:
MEMS, MOEMS, and Micromachining
Hakan Urey; Ayman El-Fatatry, Editor(s)

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