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Proceedings Paper

Fabrication of photonic integrated circuits by DUV-induced modification of polymers
Author(s): Patric Henzi; Dominik Gerhard Rabus; Ulrike Wallrabe; Juergen Mohr
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Paper Abstract

The expansion of high capacity optical transmission techniques into price-sensitive areas such as datacom and access networks requires a major reduction in the cost of optical components. Polymer waveguides are attractive because they are very simple to process and are promising for low-cost devices. Deep UV-induced modification of the dielectric properties of polymers is a useful technique for low cost realization of integrated optical circuits for telecommunication und sensor applications. The technique presented here has several advantages with respect to common methods because only a single polymer layer is used, which serves as the substrate and waveguide as well and no further etching or development step is required. The integration of the waveguide circuits in a polymer microoptical bench offers the possibility of combining the devices with semiconductor based optical circuits and also achieve easy fiber-chip coupling. In this work, preliminary results of Y-junctions, directional couplers, multimode interference (MMI) couplers will be given.

Paper Details

Date Published: 18 August 2004
PDF: 8 pages
Proc. SPIE 5451, Integrated Optics and Photonic Integrated Circuits, (18 August 2004); doi: 10.1117/12.544481
Show Author Affiliations
Patric Henzi, Forschungszentrum Karlsruhe (Germany)
Dominik Gerhard Rabus, Forschungszentrum Karlsruhe (Germany)
Ulrike Wallrabe, Forschungszentrum Karlsruhe (Germany)
Juergen Mohr, Forschungszentrum Karlsruhe (Germany)

Published in SPIE Proceedings Vol. 5451:
Integrated Optics and Photonic Integrated Circuits
Giancarlo C. Righini; Seppo Honkanen, Editor(s)

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