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Proceedings Paper

CMOS-compatible RF MEMS switch
Author(s): Narendra V. Lakamraju; Bruce Kim; Stephen M. Phillips
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Paper Abstract

Mobile technologies have relied on RF switches for a long time. Though the basic function of the switch has remained the same, the way they have been made has changed in the recent past. In the past few years work has been done to use MEMS technologies in designing and fabricating an RF switch that would in many ways replace the electronic and mechanical switches that have been used for so long. The work that is described here is an attempt to design and fabricate an RF MEMS switch that can handle higher RF power and have CMOS compatible operating voltages.

Paper Details

Date Published: 16 August 2004
PDF: 9 pages
Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.544120
Show Author Affiliations
Narendra V. Lakamraju, Arizona State Univ. (United States)
Bruce Kim, Arizona State Univ. (United States)
Stephen M. Phillips, Arizona State Univ. (United States)

Published in SPIE Proceedings Vol. 5455:
MEMS, MOEMS, and Micromachining
Hakan Urey; Ayman El-Fatatry, Editor(s)

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