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Proceedings Paper

X-ray reflectometry applied to amorphous carbon thin films prepared by sputtering radio frequency
Author(s): Ismail Aboudihab; Elmaati Ech-chamikh; Roger A. Lessard
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Paper Abstract

We obtained amorphous carbon (a-C) thin films, deposited on glass and silicon substrates, by sputtering radio frequency (RF) from a pure graphite target. The properties of these layers are studied by x-ray reflectometry. We present here a precise and simple method to measure layer thicknesses and densities.

Paper Details

Date Published: 15 December 2003
PDF: 5 pages
Proc. SPIE 5260, Applications of Photonic Technology 6, (15 December 2003); doi: 10.1117/12.543948
Show Author Affiliations
Ismail Aboudihab, Cadi Ayyad Univ. (Morocco)
Univ. Laval (Canada)
Elmaati Ech-chamikh, Cadi Ayyad Univ. (Morocco)
Roger A. Lessard, COPL/Univ. Laval (Canada)

Published in SPIE Proceedings Vol. 5260:
Applications of Photonic Technology 6
Roger A. Lessard; George A. Lampropoulos, Editor(s)

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