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Proceedings Paper

Displacement measurements of technical surfaces with a synchronously pumped external cavity diode laser
Author(s): Jasper Mobius; Jurgen Czarske; Karsten Moldenhauer; Wolfgang Ertmer; Thomas Muller-Wirts
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Paper Abstract

A novel principle for absolute position measurements of rough surfaces is presented. A measurement object with a rough surface acts as an external reflector for an antireflection coated laser diode. Determining the longitudinal mode spacing yields the distance from the laser diode to the measurement object. Synchronous pumping of the laser diode results in locking of the modes of the built-up Fabry-Perot resonator. Due to resonance enhancement the mode locked external cavity laser sensor allows highly resolved displacement measurements of rough surfaces. The influence of the object as well as the active gain medium on the accuracy of the measurements is investigated by experiments and simulations.

Paper Details

Date Published: 10 September 2004
PDF: 10 pages
Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); doi: 10.1117/12.543886
Show Author Affiliations
Jasper Mobius, Laser Zentrum Hannover e.V. (Germany)
Jurgen Czarske, Laser Zentrum Hannover e.V. (Germany)
Karsten Moldenhauer, Univ. Hannover (Germany)
Laser Zentrum Hannover e.V. (Germany)
Wolfgang Ertmer, Univ. Hannover (Germany)
Laser Zentrum Hannover e.V. (Germany)
Thomas Muller-Wirts, TEM Messtechnik GmbH (Germany)


Published in SPIE Proceedings Vol. 5457:
Optical Metrology in Production Engineering
Wolfgang Osten; Mitsuo Takeda, Editor(s)

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