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Proceedings Paper

Ellipsometric investigations of polished surface of glass/ceramic with ultralow coefficient of the temperature expansion
Author(s): Vladimir Petrovich Maslov; Anna Z. Sarsembaeva; Fiodor Fedorovych Sizov
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Paper Abstract

The results of ellipsometric investigations of surfaces of glassceramic samples with ultra low coefficient of thermal expansion are presented. These glassceramic samples are used in manufacturing of precision parts of optical instruments, for instance for telescope mirrors manufacturing. The aim of these investigations was to study the influence of the surface damaged layer and elastic deformations on the residual ellipticity of polished surfaces of glassceramic samples with ultra low temperature expansion coefficient. It was shown that with increasing of the surface layer polished depth damaged by grinding, the residual ellipticity decreases up to the value that remains a constant. Its value is determined by the material structure and stresses in the surface layer.

Paper Details

Date Published: 8 September 2004
PDF: 7 pages
Proc. SPIE 5454, Micro-Optics: Fabrication, Packaging, and Integration, (8 September 2004); doi: 10.1117/12.543878
Show Author Affiliations
Vladimir Petrovich Maslov, Institute of Semiconductor Physics (Ukraine)
Anna Z. Sarsembaeva, Institute of Semiconductor Physics (Ukraine)
Fiodor Fedorovych Sizov, Institute of Semiconductor Physics (Ukraine)


Published in SPIE Proceedings Vol. 5454:
Micro-Optics: Fabrication, Packaging, and Integration
Peter Van Daele; Juergen Mohr, Editor(s)

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