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Proceedings Paper

Passive millimeter-wave focal plane array
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Paper Abstract

We built and tested a low-cost 8-by-8 millimeter-wave focal plane array using antenna-coupled micro-bolometers. The array consists of slot antennas coupled to nickel bolometers and was fabricated using optical lithography on high-resistivity silicon wafers. The measured noise equivalent temperature difference (NETD) of an individual element was 450 K. Simulation results corresponded with observed device performance. An improved design was then implemented using a square spiral antenna. We discuss the fabrication of this type of array element, include some modeling results, and present the methods and results of our measurements.

Paper Details

Date Published: 12 August 2004
PDF: 8 pages
Proc. SPIE 5410, Radar Sensor Technology VIII and Passive Millimeter-Wave Imaging Technology VII, (12 August 2004); doi: 10.1117/12.542753
Show Author Affiliations
Charles F. Middleton, College of Optics and Photonics/Univ. of Central Florida (United States)
Guy Zummo, College of Optics and Photonics/Univ. of Central Florida (United States)
Arthur Robert Weeks, College of Optics and Photonics/Univ. of Central Florida (United States)
Albert N. Pergande, Lockheed Martin Corp. (United States)
Lee Mirth, Lockheed Martin Corp. (United States)
Glenn D. Boreman, College of Optics and Photonics/Univ. of Central Florida (United States)


Published in SPIE Proceedings Vol. 5410:
Radar Sensor Technology VIII and Passive Millimeter-Wave Imaging Technology VII
Robert Trebits; Roger Appleby; David A. Wikner; James L. Kurtz; Neil N. Salmon, Editor(s)

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