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Proceedings Paper

Micro- and nano-NDE in the laboratory for acoustic diagnosis and quality assurance
Author(s): Bernd Koehler; Juergen Schreiber; Beatrice Bendjus; Martin Herms; Valeri Melov; Lukas Helfen; Petr Mikulik; Tilo Baumbach
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Paper Abstract

NDE activities at the Laboratory for Acoustic Diagnosis and Quality Assurance (EADQ) Dresden are outlined. The applied methods comprise acoustic, thermal, optical and X-ray ones. Additionally, scanning probe methods (SPM) and scanning electron microscopy (SEM) are used. Combinations of different methods are especially effective. This is demonstrated for the coupling of an acoustic approach with SEM. For NDE on a micro- and nano-meter scale, preparation of appropriate test flaws and the verification of the NDE results turn out to be a challenge. To meet this challenge, we propose an approach based on focused ion beam technique.

Paper Details

Date Published: 21 July 2004
PDF: 15 pages
Proc. SPIE 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II, (21 July 2004); doi: 10.1117/12.541652
Show Author Affiliations
Bernd Koehler, Fraunhofer-Institut fur Zerstuerungsfreie Pruefverfahren (Germany)
Juergen Schreiber, Fraunhofer-Institut fur Zerstuerungsfreie Pruefverfahren (Germany)
Beatrice Bendjus, Fraunhofer-Institut fur Zerstuerungsfreie Pruefverfahren (Germany)
Martin Herms, Fraunhofer-Institut fur Zerstuerungsfreie Pruefverfahren (Germany)
Valeri Melov, Fraunhofer-Institut fur Zerstuerungsfreie Pruefverfahren (Germany)
Lukas Helfen, Fraunhofer-Institut fur Zerstuerungsfreie Pruefverfahren (Germany)
Petr Mikulik, Fraunhofer-Institut fur Zerstuerungsfreie Pruefverfahren (Germany)
Tilo Baumbach, Fraunhofer-Institut fur Zerstuerungsfreie Pruefverfahren (Germany)


Published in SPIE Proceedings Vol. 5392:
Testing, Reliability, and Application of Micro- and Nano-Material Systems II
Norbert Meyendorf; George Y. Baaklini; Bernd Michel, Editor(s)

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