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Proceedings Paper

Fundamental aspects in machining of metals with short and ultrashort laser pulses
Author(s): Detlef Breitling; Andreas Ruf; Friedrich Dausinger
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Paper Abstract

On the fast growing market of precision micro-machining of metals lasers do not only compete with other methods of structuring. There is also strong competition among different laser-processing strategies and, especially, among laser sources with different pulse duration. A comprehensive study of laser micro-machining with nanosecond, picosecond, and femtosecond laser pulses will be presented with a focus on fundamental aspects of the processes and on their practical consequences. An analysis will be given of the potential or the limitations of these laser processes with respect to their industrial application.

Paper Details

Date Published: 15 July 2004
PDF: 15 pages
Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); doi: 10.1117/12.541434
Show Author Affiliations
Detlef Breitling, Univ. Stuttgart (Germany)
Andreas Ruf, Univ. Stuttgart (Germany)
Friedrich Dausinger, Univ. Stuttgart (Germany)


Published in SPIE Proceedings Vol. 5339:
Photon Processing in Microelectronics and Photonics III
Jan J. Dubowski; Peter R. Herman; Friedrich G. Bachmann; Willem Hoving; Jim Fieret; David B. Geohegan; Frank Träger; Kunihiko Washio; Alberto Pique; Xianfan Xu; Tatsuo Okada, Editor(s)

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