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Improved mechanical properties of metallic micro-structures
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Paper Abstract

Properties of materials used in micro- and nano-technology are rather different from those of bulk material and even to lateral macroscopic extended thin films. Designing MOEMs components, it has to be clarified how functionality and reliability of the micro-devices are influenced. Suitable tools are necessary to test the materials properties on micro- and submicro-scale. The application of Al- and Ti-layers in micro-mirror devices is discussed. Attempts to control and improve their mechanical properties in accordance with the application requirements for micro-mirror devices are described.

Paper Details

Date Published: 21 July 2004
PDF: 9 pages
Proc. SPIE 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II, (21 July 2004); doi: 10.1117/12.541312
Show Author Affiliations
Juergen Schreiber, Fraunhofer-Institut fur Zerstuerungsfreie Pruefverfahren (Germany)
Stefan Braun, Fraunhofer-Institut fur Werkstoff-und Strahltechnik (Germany)
Alexandre Gatto, Fraunhofer-Institut fur Angewandte Optik und Feinmechanik (Germany)
Harald Schenk, Fraunhofer-Institut fur Photonische Mikrosysteme (Germany)

Published in SPIE Proceedings Vol. 5392:
Testing, Reliability, and Application of Micro- and Nano-Material Systems II
Norbert Meyendorf; George Y. Baaklini; Bernd Michel, Editor(s)

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