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Proceedings Paper

Advanced laser optics for laser material processing
Author(s): Keiji Ebata; Keiji Fuse; Takayuki Hirai; Kenichi Kurisu
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Paper Abstract

The demand for uniform intensity distribution is rising rapidly in the field of thermal processing. In this study we propose beam homogenizers with aspheric lenses or diffractive optical elements (DOE) that can convert a non-uniform Gaussian distribution into a top-hat-shaped uniform intensity distribution. The circular beam homogenizer consists of two aspheric lenses. And we propose several types of beam homogenizer, namely, rectangular and linear using DOE technology. Especially, we present a spot array generation homogenizer that can anneal several points simultaneously. This paper suggests possibilities of advance laser optics for new types of laser material processing.

Paper Details

Date Published: 18 November 2003
PDF: 7 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.541164
Show Author Affiliations
Keiji Ebata, Sumitomo Electric Industries, Ltd. (Japan)
Keiji Fuse, Sumitomo Electric Industries, Ltd. (Japan)
Takayuki Hirai, Sumitomo Electric Industries, Ltd. (Japan)
Kenichi Kurisu, Sumitomo Electric Industries, Ltd. (Japan)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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