Share Email Print
cover

Proceedings Paper

Experimental assessment of machining accuracy obtainable by femtosecond-laser surface structuring
Author(s): Thomas Hoeche; Tino Petsch; David Ruthe; Klaus-Peter Zimmer; Frank Syrowatka; Frank Heyroth
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Surface replica films taken from fs-laser machined silicon wafers coated with a 20 nm thick layer of nickel are analyzed in an environmental scanning electron microscope. Electron-probe microanalysis on the replica film is used to assess the spatial distribution and elemental composition of debris.

Paper Details

Date Published: 18 November 2003
PDF: 2 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.541156
Show Author Affiliations
Thomas Hoeche, 3D-Micromac AG (Germany)
Tino Petsch, 3D-Micromac AG (Germany)
David Ruthe, Leibniz-Institut fuer Oberflaechenmodifizierung e.V. (Germany)
Klaus-Peter Zimmer, Leibniz-Institut fuer Oberflaechenmodifizierung e.V. (Germany)
Frank Syrowatka, Martin-Luther-Univ. Halle-Wittenberg (Germany)
Frank Heyroth, Martin-Luther-Univ. Halle-Wittenberg (Germany)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

© SPIE. Terms of Use
Back to Top