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Proceedings Paper

Experimental assessment of machining accuracy obtainable by femtosecond-laser surface structuring
Author(s): Thomas Hoeche; Tino Petsch; David Ruthe; Klaus-Peter Zimmer; Frank Syrowatka; Frank Heyroth
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Paper Abstract

Surface replica films taken from fs-laser machined silicon wafers coated with a 20 nm thick layer of nickel are analyzed in an environmental scanning electron microscope. Electron-probe microanalysis on the replica film is used to assess the spatial distribution and elemental composition of debris.

Paper Details

Date Published: 18 November 2003
PDF: 2 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.541156
Show Author Affiliations
Thomas Hoeche, 3D-Micromac AG (Germany)
Tino Petsch, 3D-Micromac AG (Germany)
David Ruthe, Leibniz-Institut fuer Oberflaechenmodifizierung e.V. (Germany)
Klaus-Peter Zimmer, Leibniz-Institut fuer Oberflaechenmodifizierung e.V. (Germany)
Frank Syrowatka, Martin-Luther-Univ. Halle-Wittenberg (Germany)
Frank Heyroth, Martin-Luther-Univ. Halle-Wittenberg (Germany)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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