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Proceedings Paper

Site-selective dye deposition onto micropatterns of fused silica fabricated with laser-induced backside wet etching (LIBWE)
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Paper Abstract

A novel approach for the fabrication of micropatterns where dye molecules can be site-selectively desposited is described. The micropatterns were fabricated on the surface of fused silica plates using the technique of laser-induced backside wet etching (LIBWE). Prior to the LIBWE process, the surface properties of the fused silica plates were modified with self-assembling trimethoxysilanes bearing functional moieties. On the non-irradiated areas, the self-assembled monolayers (SAMs) survived the LIBWE process, and the remaining SAM acted as a template for the subsequent dye deposition either with chemical bonding or physical adsorption. Site-selective dye deposition was visualized with fluorescence microscopic observation. These results are applicable for micro-fluidic reactors and chemical sensors.

Paper Details

Date Published: 18 November 2003
PDF: 6 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.541072
Show Author Affiliations
Ximing Ding, National Institute of Advanced Industrial Science and Technology (AIST) (Japan)
Yoshizo Kawaguchi, National Institute of Advanced Industrial Science and Technology (AIST) (Japan)
Tadatake Sato, National Institute of Advanced Industrial Science and Technology (AIST) (Japan)
Aiko Narazaki, National Institute of Advanced Industrial Science and Technology (AIST) (Japan)
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (AIST) (Japan)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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