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Proceedings Paper

Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser
Author(s): Masashi Masuda; Koji Sugioka; Ya Cheng; Masako Kawachi; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa
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Paper Abstract

We show that femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties on transparency, hardness, chemical and thermal resistances. After exposure of the focused laser beam, the latent images are written. Modified regions are developed by a post baking process and then preferentially etched away in dilute solution of hydrofluoric (HF) acid solution in an ultrasonic bath at room temperature. The contrast ratio in etching selectivity is examined for different concentration of HF solution. Based on this result, a freely movable microplate which has a function of microvalve in the microreactor is fabricated inside the glass.

Paper Details

Date Published: 18 November 2003
PDF: 5 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.541066
Show Author Affiliations
Masashi Masuda, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Tokyo Univ. of Science (Japan)
Koji Sugioka, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Tokyo Univ. of Science (Japan)
Ya Cheng, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Masako Kawachi, HOYA Photonics Corp. (Japan)
Kazuhiko Shihoyama, HOYA Photonics Corp. (Japan)
Koichi Toyoda, Tokyo Univ. of Science (Japan)
Katsumi Midorikawa, The Institute of Physical and Chemical Research (RIKEN) (Japan)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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