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Proceedings Paper

Fabrication of three-dimensional microstructures by stacking laser-direct-write layers
Author(s): Sungho Jeong; Seongil Han; Jayaraman Senthil Selvan
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Paper Abstract

Laser-induced chemical vapor deposition is applied to fabricate three-dimensional microstructures that have cross-sectional profiles other than simple combination of deposited fibers. To fabricate microstructures other than combined wire-frames, a thin layer of deposit in desired patterns is first written using laser-direct-write technique and on top of this layer a second layer is deposited to provide the third dimension normal to the surface. By depositing many layers, a full three-dimensional microstructure is fabricated. Optimum deposition conditions for direct writing of initial and subsequent layers with good surface quality and profile uniformity are determined. Using an argon ion laser and ethylene as the light source and reaction gas, respectively, fabrication of three-dimensional carbon microstructures with the proposed method is demonstrated.

Paper Details

Date Published: 18 November 2003
PDF: 5 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.541056
Show Author Affiliations
Sungho Jeong, Kwangju Institute of Science and Technology (South Korea)
Seongil Han, Kwangju Institute of Science and Technology (South Korea)
Jayaraman Senthil Selvan, Kwangju Institute of Science and Technology (South Korea)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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