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Proceedings Paper

Laser-induced single step micro/nanopatterning
Author(s): Dieter Baeuerle; Gerard Wysocki; Lars Landstroem; Johannes Klimstein; Klaus Piglmayer; Johannes Heitz
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Paper Abstract

Recent achievements in laser-induced surface patterning obtained in our group are summarized. Here, we have employed both a SNOM-type setup and two-dimensional lattices of SiO2 microspheres formed by self-assembly processes. With the SNOM-type setup we have demonstrated nanoscale photochemical and photothermal etching, mainly of Si in Cl2 atmosphere. With 2D lattices of microspheres a large number of single features can be generated by a single or a few laser shots. Among the examples presented is the surface patterning by ablation, etching, deposition, and surface modification.

Paper Details

Date Published: 18 November 2003
PDF: 5 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.541052
Show Author Affiliations
Dieter Baeuerle, Johannes-Kepler-Univ. Linz (Austria)
Gerard Wysocki, Johannes-Kepler-Univ. Linz (Austria)
Lars Landstroem, Johannes-Kepler-Univ. Linz (Austria)
Johannes Klimstein, Johannes-Kepler-Univ. Linz (Austria)
Klaus Piglmayer, Johannes-Kepler-Univ. Linz (Austria)
Johannes Heitz, Johannes-Kepler-Univ. Linz (Austria)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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