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Proceedings Paper

High precision laser processing of sensitive materials by Microjet
Author(s): Ochelio D. Sibailly; Frank Ruediger Wagner; Laetitia Mayor; Bernold Richerzhagen
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Paper Abstract

Material laser cutting is well known and widely used in industrial processes, including micro fabrication. An increasing number of applications require nevertheless a superior machining quality than can be achieved using this method. A possibility to increase the cut quality is to opt for the water-jet guided laser technology. In this technique the laser is conducted to the work piece by total internal reflection in a thin stable water-jet, comparable to the core of an optical fiber. The water jet guided laser technique was developed originally in order to reduce the heat damaged zone near the cut, but in fact many other advantages were observed due to the usage of a water-jet instead of an assist gas stream applied in conventional laser cutting. In brief, the advantages are three-fold: the absence of divergence due to light guiding, the efficient melt expulsion, and optimum work piece cooling. In this presentation we will give an overview on several industrial applications of the water-jet guided laser technique. These applications range from the cutting of CBN or ferrite cores to the dicing of thin wafers and the manufacturing of stencils, each illustrates the important impact of the water-jet usage.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540932
Show Author Affiliations
Ochelio D. Sibailly, Synova SA (Switzerland)
Frank Ruediger Wagner, Synova SA (Switzerland)
Laetitia Mayor, Synova SA (Switzerland)
Bernold Richerzhagen, Synova SA (Switzerland)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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