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Proceedings Paper

Calibration of an electro-optical variable circular retarder with application in a nulling microellipsometer
Author(s): Yew Li Hor; Qiwen Zhan
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Paper Abstract

We report on the design and calibration of a high speed electro-optical variable circular retarder (EOVCR). This retarder consists of an electro-optical variable linear retarder and two quarter-wave plates aligned at specific angles. This EOVCR provides a pure polarization rotation that is independent of the initial incoming polarization. Application of this device in a rotationally symmetric microellipsometer design is also discussed. The use of such an EOVCR eliminates the vibrational noise reported in the previously reported microellipsometer design and allows a high speed nulling detection scheme to be used, substantially improving the accuracy of microellipsometer.

Paper Details

Date Published: 21 July 2004
PDF: 7 pages
Proc. SPIE 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II, (21 July 2004); doi: 10.1117/12.540845
Show Author Affiliations
Yew Li Hor, Univ. of Dayton Research Institute (United States)
Qiwen Zhan, Univ. of Dayton Research Institute (United States)


Published in SPIE Proceedings Vol. 5392:
Testing, Reliability, and Application of Micro- and Nano-Material Systems II
Norbert Meyendorf; George Y. Baaklini; Bernd Michel, Editor(s)

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