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Proceedings Paper

UV-laser assisted fabrication of dispersive structures in polymeric integrated-optical components
Author(s): Carsten Wochnowski; Simeon Metev; Krassimira Meteva; Frank Vollertsen
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Paper Abstract

In this article the fabrication of grating structures in the surface of planar polymer chips by the phase mask method is discussed. By this way surface relief gratings (SRG) and bragg-structures can be generated by UV-laser irradiation. Especially the topographical surface properties of the gratings have been examined. Potential applications are the field of optical sensor and information technology.

Paper Details

Date Published: 18 November 2003
PDF: 6 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540767
Show Author Affiliations
Carsten Wochnowski, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Simeon Metev, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Krassimira Meteva, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Frank Vollertsen, Bremer Institut fuer Angewandte Strahltechnik (Germany)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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