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Proceedings Paper

Ultrafast laser nanofabrication assisted with near-field scanning optical microscopy
Author(s): Weijie Wang; Ming Hui Hong; Dongjiang Wu; Yeow Whatt Goh; Y. Lin; P. Luo; Boris S. Luk'yanchuk; Yongfeng Lu; Tow Chong Chong
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Paper Abstract

We have developed the laser nanoprocessing technique by the integration of the ultrafast laser and near-field scanning microscopy (NSOM). The second harmonic femtosecond laser working in the optical near-field with the assistance of NSOM equipment was applied to expose the photosensitive polymer material. The nanopatterns with feature size smaller than the laser wavelength can be fabricated. The optical diffraction limitation is therefore broken through by the near-field nanoprocessing. It was found in our experiment that the nanofabrication feature size depends strongly on the gap between the fiber probe tip and the substrate surface, as well as the laser coupling efficiency. The approach offers the advantages of high precision, speed and selectivity in nanopatterning, and is promising to be used in data storage device manufacture for higher density recording.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540758
Show Author Affiliations
Weijie Wang, Data Storage Institute (Singapore)
Ming Hui Hong, Data Storage Institute (Singapore)
Dongjiang Wu, Data Storage Institute (Singapore)
Yeow Whatt Goh, Data Storage Institute (Singapore)
Y. Lin, Data Storage Institute (Singapore)
P. Luo, Data Storage Institute (Singapore)
Boris S. Luk'yanchuk, Data Storage Institute (Singapore)
Yongfeng Lu, Univ. of Nebraska (United States)
Tow Chong Chong, Data Storage Institute (Singapore)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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