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Proceedings Paper

Laser microprocessing: facts and trends
Author(s): Michael Schmidt; Gerd Esser
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Paper Abstract

Micro technology is an application field, in which laser-based processes show a particularly high growth potential. New developments within the range of laser sources promote the laser application likewise, as the multiplicity of today already successfully realized applications. These encourage users ever more to focus on the tool called laser. With this contribution one tries to give an overview over developments and trends in the most important branches of laser beam micromachining. In detail semiconductor manufacturing, interconnect and micro mechanics are addressed. The contribution neither raises a claim on completeness, nor is to be given an absolutely measurable evaluation of the innovation value of interesting new developments. The goal of this contribution is to be a basis for a fruitful discussion between laser researchers, developers, users and manufacturers by supplying with information about activities in the field of micro technology.

Paper Details

Date Published: 18 November 2003
PDF: 9 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540742
Show Author Affiliations
Michael Schmidt, Bayerisches Laserzentrum gGmbH (Germany)
Gerd Esser, Bayerisches Laserzentrum gGmbH (Germany)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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