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Proceedings Paper

Laser microfabrication of glass substrates by pocket scanning
Author(s): B. Lan; Ming Hui Hong; Kaidong D. Ye; Z. B. Wang; Tow Chong Chong
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Paper Abstract

Precise laser microfabrication of glass is a high challenge task due to the stress-induced microcracks generated during laser ablation. In this paper, the results of high quality glass microfabrication by low energy Nd:YAG laser (355 nm, 30 ns) ablation and pocket scanning technique are presented. The pocket scanning is to scan the laser beam along parallel overlapped paths with the last path along the structure edge, while the conventional direct scanning is to scan the beam just along the structure edge. It is found that the cracks formed around the edges by pocket scanning are reduced significantly compared to that by direct scanning. Minimum crack sizes of less than 10 μm have been obtained at optimized parameters. The ablation depth is also enhanced greatly by pocket scanning to increase almost linearly with the laser fluence and scanning loop. There are no limitations of saturation as that observed in the cases of direct scanning.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540725
Show Author Affiliations
B. Lan, Data Storage Institute (Singapore)
National Univ. of Singapore (Singapore)
Ming Hui Hong, Data Storage Institute (Singapore)
National Univ. of Singapore (Singapore)
Kaidong D. Ye, Data Storage Institute (Singapore)
Z. B. Wang, Data Storage Institute (Singapore)
National Univ. of Singapore (Singapore)
Tow Chong Chong, Data Storage Institute (Singapore)
National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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