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Proceedings Paper

Glass processing using microsecond, nanosecond and femtosecond pulsed lasers
Author(s): Arzu Ozkan; Leonard R. Migliore; Corey M. Dunsky; Michael W. Phaneuf
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Paper Abstract

Laser processing of glass components is of significant commercial interest for the optoelectronics and telecommunications industries. In this paper, we present laser processing techniques using microsecond, nanosecond, and femtosecond lasers for machining of glass. Surface structures, mainly groove geometries, are generated with a diode-pumped solid-state nanosecond pulsed UV laser operating at 266 nm, a Q-switched CO2 laser operating at 9.25 μm, a CO2 laser operating at 10.6 μm and the femtosecond pulsed laser operating at 800 nm. Grooves are cross-sectioned and viewed with a focused ion beam (FIB) microscope. The resultant material structures are examined with respect to the differences in time scale and the appropriateness of each laser type for particular processes.

Paper Details

Date Published: 18 November 2003
PDF: 5 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540701
Show Author Affiliations
Arzu Ozkan, Coherent, Inc. (United States)
Leonard R. Migliore, Coherent, Inc. (United States)
Corey M. Dunsky, Coherent, Inc. (United States)
Michael W. Phaneuf, Fibics Inc. (Canada)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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