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Proceedings Paper

Three-dimensional micro-optical components embedded in Foturan glass by a femtosecond laser
Author(s): Ya Cheng; Koji Sugioka; Masashi Masuda; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa
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Paper Abstract

Three-dimensional (3D) microoptical components are embedded in a photosensitive glass Foturan by a femtosecond (fs) laser. This process includes mainly three steps: (1) direct writing of latent images in the sample by the tightly focused fs laser beam; (2) baking of the sample in a programmable furnace for the formation of modified regions; and (3) etching of the sample in a 10% diluted solution of hydrofluoric acid for the selective removal of the modified regions. After this process, hollow internal structures are formed, which act as a mirror and a beam splitter. Furthermore, we find that postannealing smoothes the surfaces of the fabricated hollow structures, resulting in the great improvement of the optical properties. We examine the optical properties of the structured components using a He-Ne laser beam, and measure the optical losses at 1.55 μm wavelength.

Paper Details

Date Published: 18 November 2003
PDF: 5 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540697
Show Author Affiliations
Ya Cheng, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Koji Sugioka, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Tokyo Univ. of Science (Japan)
Masashi Masuda, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Tokyo Univ. of Science (Japan)
Kazuhiko Shihoyama, HOYA Photonics Corp. (Japan)
Koichi Toyoda, Tokyo Univ. of Science (Japan)
Katsumi Midorikawa, The Institute of Physical and Chemical Research (RIKEN) (Japan)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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