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Proceedings Paper

Fundamental properties of 3D microfabrication using a femtosecond laser
Author(s): Mikio Yamanoi; Satoshi Wada; Masahiro Anzai; Hitoshi Ohmori; Akitake Makinouchi
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Paper Abstract

Micro scaled grooves and cavities are fabricated with the method of direct writing and superposing grooving in ambient air using femtosecond laser pulses and copper, aiming at establishing an industrially useful femtosecond laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. The following items are demanded to make femtosecond laser processing machine an industrially useful tool. (1) There is no thermally influenced region around the area irradiated by the laser beam. (2) Surfaces irradiated laser beam are smooth. (3) Substances ablated to form are not attached on the surface of the work. In this study, fundamental properties of grooving and cavity processing are investigated experimentally, considering above items, especially eyeing on the items (1) and (2). As a result obtained in this research, the method of direct writing and superposing grooving havs a potential to fabricate micro scaled structure.

Paper Details

Date Published: 18 November 2003
PDF: 3 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540604
Show Author Affiliations
Mikio Yamanoi, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Satoshi Wada, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Masahiro Anzai, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Hitoshi Ohmori, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Akitake Makinouchi, The Institute of Physical and Chemical Research (RIKEN) (Japan)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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