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Proceedings Paper

Direct femtosecond laser writing system for sub-micron and micron scale patterning
Author(s): Egidijus Vanagas; Dmitry Tuzhilin; Michail Zinkou; Alexander Sedunov; Nikolai Vasiliev; Igor Kudryashov; Vladimir Kononov; Shozi Suruga
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Paper Abstract

Commercial femtosecond micromachining system (FMS) has been developed that capable to process the material in sub-micron (< 200 nm) and micron scale. Core of the system are: optical unit, controller unit and software. The other parts: fs-laser system; focusing unit; stage unit can be varied (exchangeable). Two different fs-laser systems already are compatible with core of FMS: Mira/RegA (Coherent) and Hurricane (Spectra-Physics). FMS controller unit allows to control every single fs-pulse delivery on the target. Three possible types of focusing unit are available: microscope type unit, long focal distance lens unit, and axicon lens based unit. Standard stage unit options are: three-axis piezostage, and two-axis air bearing stage combined with Z-axis piezostage. Repeatability for all dimensions is within ±5 nm. Also, step motor stages are available. The system allows 3D scan with confocal laser-microscope (resolution δr=200nm, δz=540nm) build in optical unit. Software controls all basic functions of the system performance and writing any pattern (including 3D) on or into specimen. The results obtained by direct fs-laser writing method are presented and discussed: bits in the range of 100 - 200 nm sizes, 6 TB/cm3 density optical storage matrix, waveguides fabrication inside transparent materials, high aspect ratio (1:125) patterning of dielectric materials with Gauss-Bessel beam.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540538
Show Author Affiliations
Egidijus Vanagas, Tokyo Instruments, Inc. (Japan)
Dmitry Tuzhilin, Tokyo Instruments, Inc. (Japan)
Michail Zinkou, LOTIS TII (Belarus)
Alexander Sedunov, LOTIS TII (Belarus)
Nikolai Vasiliev, LOTIS TII (Belarus)
Igor Kudryashov, Tokyo Instruments, Inc. (Japan)
Vladimir Kononov, LOTIS TII (Belarus)
Shozi Suruga, Tokyo Instruments, Inc. (Japan)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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