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Proceedings Paper

Sub-wavelength grid patterns on silicon surface by pulsed CO2 laser irradiation
Author(s): Wei-Jie Wang; M. F. Tan; Ming Hui Hong; Tow Chong Chong
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Paper Abstract

Our previous paper reported on pulsed CO2 laser induced periodic microstructures on the silicon substrates, which are coated with a thin material layer at the bottom surface to promote optical absorption. Our further study shows that two sets of parallel fringes generated at right angles can overlap and produce crossed-grid patterns when the laser pulse energy just crosses the thershold required for fringe formation. The fringe period is of sub-wavelength scale and the crossed-grid pattern is of grid size 2 μm by 2 μm. The fringes are considered to be due to the laser induced periodic surface structure (LIPSS) effect. The crossed-grid patterns are only possible when thermal bumps due to the thermal capillary wave effect are minimized, and they become re-writable at higher pulse energies.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540537
Show Author Affiliations
Wei-Jie Wang, Data Storage Institute (Singapore)
M. F. Tan, National Univ. of Singapore (Singapore)
Ming Hui Hong, Data Storage Institute (Singapore)
Tow Chong Chong, Data Storage Institute (Singapore)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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