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Proceedings Paper

Micro sculpting technology using DPSSL
Author(s): Won-Seok Chang; Bosung Shin; Jae-gu Kim; Kyung-Hyun Whang
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Paper Abstract

Multiple pulse laser ablation of polymer is performed with DPSS (Diode Pumped Solid State) 3rd harmonic Nd:YVO4 laser (355 nm) in order to fabricate three-dimensional micro components. Here we considered mechanistic aspects of the interaction between UV laser and polymer to obtain optimum process conditions for maskless photomachining using DPSSL. The photo-physical and photochemical parameters such as laser wavelength and optical characteristics of polymers are investigated by experiments to reduce plume effect, which induce the re-deposited debris on the surface of substrate. In this study, LDST (laser direct sculpting technique) are developed to gain various three-dimensional shape with size less than 500 micrometer. Main process sequences are from rapid prototyping technology such as CAD/CAM modeling of products, machining path generation, layer-by-layer machining, and so on. This method can be applied to manufacture the prototype of micro device and the polymer mould for mass production without expensive mask fabrication.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540534
Show Author Affiliations
Won-Seok Chang, Korea Institute of Machinery and Materials (South Korea)
Bosung Shin, Korea Institute of Machinery and Materials (South Korea)
Jae-gu Kim, Korea Institute of Machinery and Materials (South Korea)
Kyung-Hyun Whang, Korea Institute of Machinery and Materials (South Korea)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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