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Proceedings Paper

New methods to control quality and precision of micro-machining with femtosecond lasers
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Paper Abstract

Due to the rapid development of ultrashort lasers, quality of the machining is of prime interest for several applications. For instance deep marking of various materials. In this case, the depth can be controlled, knowing the ablation rate for the corresponding material. The evolution of ablation rates of Al, Cu and Ni are given in relation to the energy density. In metals the effect of thermal diffusion has to be taken into account to control collateral effects and especially the heat affected zone.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540515
Show Author Affiliations
Ronan Le Harzic, Univ. Jean Monnet Saint-Etienne (France)
Nicolas Sanner, Univ. Jean Monnet Saint-Etienne (France)
Nicolas Huot, Univ. Jean Monnet Saint-Etienne (France)
C. Donnet, Univ. Jean Monnet Saint-Etienne (France)
Eric Audouard, Univ. Jean Monnet Saint-Etienne (France)
Pierre Laporte, Univ. Jean Monnet Saint-Etienne (France)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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