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Proceedings Paper

Rotational micromachining tool controlled by optical radiation pressure
Author(s): Yasuhiro Hidaka; Takashi Miyoshi; Yasuhiro Takaya; Tetsuo Sasaki; Kenji Shirai
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Paper Abstract

This paper describes a new approach for micromachining using optical radiation pressure, which can not only trap and manipulate, but also rotate a dielectric particle with micrometer size. In order to verify the feasibility of our proposed micromachining, we fabricated a shuttlecock optical rotator as a rotational micromachining tool from a silica particle (5μm in diameter) by focused ion beam (FIB). Fundamental experiments were performed about the influence of focus point and laser power on the rotational properties of the machining tool. Furthermore, by traversing the rotating tool over the silicon wafer surface, it was found that the micro groove with several nm in depth could be generated.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540508
Show Author Affiliations
Yasuhiro Hidaka, Osaka Univ. (Japan)
Takashi Miyoshi, Osaka Univ. (Japan)
Yasuhiro Takaya, Osaka Univ. (Japan)
Tetsuo Sasaki, Nippon Institute of Technology (Japan)
Kenji Shirai, Nihon Univ. (Japan)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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