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Proceedings Paper

High precision deep drilling with ultrashort pulses
Author(s): Christian Foehl; Friedrich Dausinger
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Paper Abstract

Ultrashort laser pulses appear very promising for material removal with highest precision. However, our investigations show several unexpected quality problems such as formation of recast, ripples, and irregular hole shapes even in the femtosecond-pulse regime. In this contribution influences on drilling efficiency and hole quality by several process parameters such as repetition rate and pulse duration will be presented and discussed. Furthermore different processing techniques to increase the drilling velocity will be shown. A suitable device for that purpose is a trepanning optic which was specially designed for the drilling of injection nozzles. By a variable angle of beam incidence it allows to produce holes with a well-defined conicity in combination with the high precision achieved by helical drilling.

Paper Details

Date Published: 18 November 2003
PDF: 6 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540506
Show Author Affiliations
Christian Foehl, Forschungsgesellschaft fuer Strahlwerkzeuge mbH (Germany)
Friedrich Dausinger, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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