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Proceedings Paper

Fabrication of holes and grooves on glass by a femtosecond laser
Author(s): Yoshiro Ito; Kazunori Kuroi; Kazuhide Hayakawa
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Paper Abstract

Holes and grooves of a few tens of micrometers have been fabricated on glass plates by femtosecond laser pulses in air. Shapes and surface morphology of the fabricated structures have been studied in detail by making their replicas. Details of the internal shape of the strictures formed have been studied by making replicas of them. Development of the shape of drilled hole with the increase in irradiated pulse number shows some distinguishable stages. Smaller number of pulses make channel at the center of rather flat bottom. With the increase of pulse number, the channel changed into conical, funnel-like shape as the depth increased. Shape of the groove depends on the scanning speed, i.e., number of irradiated pulses on the same position. The groove show little cracking or beaking with clear edges. Some amount of debris deposited along the groove but these debris were easily removed by smear. Inner surface of the groove has coarser morphology than that of the hole. Depth of the grove was shallower than that of the hole, even though the number of irradiated pulse was estimated to be equal.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540501
Show Author Affiliations
Yoshiro Ito, Nagaoka Univ. of Technology (Japan)
Kazunori Kuroi, Nagaoka Univ. of Technology (Japan)
Kazuhide Hayakawa, Nagaoka Univ. of Technology (Japan)

Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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