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Proceedings Paper

3D micro channels in laminated resins by UV laser ablation
Author(s): Yoshikazu Yoshida
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Paper Abstract

This paper describes the fabrication of micro-channels in resin for micro-fluidic devices such as the μ-TAS (Micro Total Analysis System) by a UV laser ablation. Numbers of heat-hardening resin-films are piled up a soda glass. A laser fabricates a part of the channel at the each film every lamination, and then 3-D confluence channels are fabricated. The channel sizes are widths of 20 - 150 μm and depths of 20 - 30 μm. The through holes are made in the laminate film by the laser. Inlet pipe for a micro-pump are inserted into the hole. Deionized water is injected into the channels with a microinjection pump. This flow rate is 5 μL/min. There is no damage to the channel, inlet, and outlet.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540471
Show Author Affiliations
Yoshikazu Yoshida, Toyo Univ. (Japan)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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