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Proceedings Paper

Process assembly for μm-scale SLS, reaction sintering, and CVD
Author(s): Robby Ebert; Peter Regenfuss; Sascha Kloetzer; Lars Hartwig; Horst Exner
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Paper Abstract

A novel device suited for the generation of sintered microparts of metal and ceramics, for reaction sintering and for CVD has been developed and successfully tested. With the production of a functional component it has evidenced professional performance. The set-up is vacuum tight; unstable substances can be processed under various shield gases and pressures; it is equipped with a device suited to rake thin layers of fine powders as well as slurries. Sub micrometer powder can be processed in steps of 1 μm thick sintered layers. In combination with a proprietary sintering regime, micro parts with a structural resolution of <30μm, and aspect ratios of >10 have been achieved.

Paper Details

Date Published: 18 November 2003
PDF: 6 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540466
Show Author Affiliations
Robby Ebert, Univ. of Applied Sciences Mittweida (Germany)
Peter Regenfuss, Univ. of Applied Sciences Mittweida (Germany)
Sascha Kloetzer, Univ. of Applied Sciences Mittweida (Germany)
Lars Hartwig, Univ. of Applied Sciences Mittweida (Germany)
Horst Exner, Univ. of Applied Sciences Mittweida (Germany)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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