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Proceedings Paper

CO2 laser annealing with NiTi thin films deposited by sputtering
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Paper Abstract

It has been proved that NiTi shape memory alloy thin film is the best one for micro actuators as compared with the others, e.g., electrostatic, electromagnetic and piezoelectric thin films. If the deposition of NiTi thin films on silicon wafers is carried out at room temperature, the resultant thin films are normally amorphous without shape memory. Subsequent annealing in a high vacuum chamber is required for re-crystallization. In this paper, we present an alternative annealing approach, namely by CO2 laser. After laser annealing, optical microscope, X-ray diffraction (XRD) and atomic force microscope (AFM) were applied to characterize the NiTi thin films. Strong austenite/martensite lattice structures were observed by XRD. The relationship between the surface roughness of the annealed NiTi thin film and temperature was obtained using AFM. The results indicate that the CO2 laser annealed NiTi thin films are with shape memory.

Paper Details

Date Published: 18 November 2003
PDF: 4 pages
Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); doi: 10.1117/12.540464
Show Author Affiliations
Q. He, Data Storage Institute (Singapore)
Nanyang Technical Univ. (Singapore)
Weiming Huang, Nanyang Technological Univ. (Singapore)
Minhui Hong, Data Storage Institute (Singapore)
Tow Chong Chong, Data Storage Institute (Singapore)
Yongqi Fu, Nanyang Technological Univ. (Singapore)
Hejun Du, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 5063:
Fourth International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Andreas Ostendorf; Koji Sugioka; Henry Helvajian, Editor(s)

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