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Proceedings Paper

Holographic imaging technique for characterization of MEMS switch dynamics
Author(s): Vytautas Ostasevicius; Arvydas Palevicius; Antanas Daugela; Minvydas Ragulskis; Ramutis Palevicius
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Paper Abstract

An innovative holographic imaging technique is applied in characterization of MEMS switch non-linear dynamics. The Duffing's non-linear oscillator based phenomenological model was adopted to study MEMS switch non-linear response due to the complicated contact phenomena and corresponding boundary conditions. An experimental contact measurement result of MEMS cantilever response that matches theoretical trends is provided. Non-destructive contact measurements were performed by means of quantitative nanomechnical test instruments. Non-contact holographic characterization method yielded results comparable with phenomenological model and contact measurements. The proposed holographic characterization method consists of digitized holographic measurements enhanced by the FEM eigenvector problem solution. Two cases were analyzed for simple and perturbated sinusoidal excitations that correspond to the free and contact boundary conditions, respectively.

Paper Details

Date Published: 29 July 2004
PDF: 12 pages
Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); doi: 10.1117/12.540183
Show Author Affiliations
Vytautas Ostasevicius, Kaunas Univ. of Technology (Lithuania)
Arvydas Palevicius, Kaunas Univ. of Technology (Lithuania)
Antanas Daugela, Hysitron, Inc. (United States)
Minvydas Ragulskis, Kaunas Univ. of Technology (Lithuania)
Ramutis Palevicius, Kaunas Univ. of Technology (Lithuania)

Published in SPIE Proceedings Vol. 5389:
Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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