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Proceedings Paper

Characterization of materials with nanoscopic filler particles by AFM techniques
Author(s): Dietmar Vogel; Juergen Keller; Bernd Michel
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Paper Abstract

In order to modify material properties different kind of filler particles are added to polymer matrices. Miniaturization in electronics, MEMS and photonics applications forces to reduce the size of filler particles, even to submicron and nano scale dimensions. R&D processes as well as later production quality control demand suitable tools and procedures to characterize filler particles, e.g., within polymeric composites. The authors studied different AFM based methods of particle detection and imaging. The underlying purpose was to utilize stress state micrographs of composites with filler particles for deformation measurements. The foreseen digital image correlation technique (DIC) for highest resolution deformation analysis is briefly introduced. In order to understand the impact of filler particles on the mechanical behavior, particle identification and imaging as well as deformation measurement has to be performed on the same micrographs. Main emphasis in this work is made on different imaging modes realizable with scanning probe microscopy (SPM), which can be used to image and to characterize submicron and nano scale fillers. Additionally the influence of surface finishing before the SPM imaging is analyzed, mainly the impact of focused ion beam (FIB) polishing after mechanical polishing. The examined SPM methods for filler characterization are compared to alternative tools like FIB, SEM, AFAM and Laser Scanning Microscopy (LSM).

Paper Details

Date Published: 21 July 2004
PDF: 10 pages
Proc. SPIE 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II, (21 July 2004); doi: 10.1117/12.540073
Show Author Affiliations
Dietmar Vogel, Fraunhofer-Institut fur Zuverlaessigkeit und Mikrointegration (Germany)
Juergen Keller, AMIC GmbH (Germany)
Bernd Michel, Fraunhofer-Institut fur Zuverlaessigkeit und Mikrointegration (Germany)

Published in SPIE Proceedings Vol. 5392:
Testing, Reliability, and Application of Micro- and Nano-Material Systems II
Norbert Meyendorf; George Y. Baaklini; Bernd Michel, Editor(s)

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