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Proceedings Paper

Shape optimization of microcantilevers for mass variation detection and AFM applications
Author(s): Ephrahim Garcia; Nicolae Lobontiu; Yoonsu Nam; Rob Ilic; Timothy Reissman
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Paper Abstract

The paper proposes an analytical model-based, lumped-parameter algorithm which enables identifying a microcantilever design that will give the optimized performance with regard to stiffness and resonant frequency values in terms of a corresponding shape and its related geometric parameters. The targeted microcantilever applications are mass variation detection and atomic force microscopy (AFM) whereby the monitored system parameters are the changes in deflection and/or the natural frequency. A design set comprises several configurations, each of them being defined by analytical curves, such as straight lines, circular or elliptical arcs, and which are quantified in terms of compliances/stiffnesses and resonant frequencies by algebraic equations. The model is capable of discerning both the intensity of external excitation and the first resonant frequencies for a given microcantilever. Finite element simulation results of the static and resonant response for these microcantilevers confirm the analytical model predictions. The optimization algorithm, which is based on this model, focuses on maximizing the master bending compliance and on spacing out the first resonant frequency from the subsequent ones in order to increase the response sensitivity of the microcantilever. The model-based optimization algorithm is a relatively low-cost and sufficiently-accurate calculation procedure, which is formulated as an alternative to existing finite element simulation.

Paper Details

Date Published: 26 July 2004
PDF: 8 pages
Proc. SPIE 5390, Smart Structures and Materials 2004: Smart Structures and Integrated Systems, (26 July 2004); doi: 10.1117/12.540043
Show Author Affiliations
Ephrahim Garcia, Cornell Univ. (United States)
Nicolae Lobontiu, Cornell Univ. (United States)
Yoonsu Nam, Kangwon National Univ. (South Korea)
Rob Ilic, Cornell Univ. (United States)
Timothy Reissman, Cornell Univ. (United States)

Published in SPIE Proceedings Vol. 5390:
Smart Structures and Materials 2004: Smart Structures and Integrated Systems
Alison B. Flatau, Editor(s)

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