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Proceedings Paper

Model development and control design for high-speed atomic force microscopy
Author(s): Andrew G. Hatch; Ralph C. Smith; Tathagata De
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Paper Abstract

This paper addresses the development of energy-based models and model-based control designs necessary to achieve present and projected applications involving atomic force microscopy. The models are based on a combination of energy analysis at the mesoscopic level with stochastic homogenization techniques to construct low-order macroscopic models. Approximate model inverses are then employed as filters to linearize transducer responses for linear robust control design.

Paper Details

Date Published: 26 July 2004
PDF: 12 pages
Proc. SPIE 5383, Smart Structures and Materials 2004: Modeling, Signal Processing, and Control, (26 July 2004); doi: 10.1117/12.539921
Show Author Affiliations
Andrew G. Hatch, North Carolina State Univ. (United States)
Ralph C. Smith, North Carolina State Univ. (United States)
Tathagata De, Iowa State Univ. (United States)


Published in SPIE Proceedings Vol. 5383:
Smart Structures and Materials 2004: Modeling, Signal Processing, and Control
Ralph C. Smith, Editor(s)

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