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Proceedings Paper

Analytical approach for characterization of sputtered thin film microthermocouples (STFMT)
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Paper Abstract

This paper describes an analytical approach for the characterization of sputtered thin film microthermocouples (STFMT) to determine the thermophysical properties of microstructures. A complete spatially one-dimensional (1D) boundary value problem with a thin film sputtered sample sandwiched between an heater/RTD (Resistance Temperature Detector) at its one end and the thin film microthermocouple at its other end has been solved to show the effects of various thermoelements on Seebeck voltage, heat loss/gain effects between the device & the environment, as well as at the contact area between the sample and microthermocouple tip. An interesting outcome for three different pairs of thermoelements studied (one material is always Titanium, and the other is Chromium, Chromium-Silicide and Tantalum, in turn) is that higher the Seebeck voltage of the microthermocouples under consideration, less accurate is the temperature sensed by it.

Paper Details

Date Published: 29 July 2004
PDF: 11 pages
Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); doi: 10.1117/12.539820
Show Author Affiliations
Muhammad Imran, Univ. of Arkansas/Little Rock (United States)
Abhijit Bhattacharyya, Univ. of Arkansas/Little Rock (United States)


Published in SPIE Proceedings Vol. 5389:
Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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