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Proceedings Paper

Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion
Author(s): James Jungho Pak; Jihong Kim; Sang Woo Oh; Jee Hee Son; Sung Hwan Cho; Seung-Ki Lee; Jong-Yeon Park; Byungkyu Kim
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Paper Abstract

This paper describes the fabrication and characteristics of an ionic polymer-metal composite (IPMC) membrane-shaped micro-actuator and its application to the fabrication of a micro-pump. After fabricating two 8mm×8mm IPMC membrane-shaped actuators using a Nafion film, their displacements were measured. The fabricated IPMC membrane-shaped micro-actuators showed displacement of 14~27μ at the applied voltage ranging from 4VP-P to 10VP-P at 0.5Hz. Displacement of the IPMC actuator fabricated with a commercially available Nafion is large enough to make the IPMC actuator a membrane-shaped micro-actuator for fabricating an IPMC micro-pump. IPMC micro-pump was fabricated by assembling IPMC membrane-shaped micro-actuator and PDMS(polydimethylsiloxane) micro-channel together. PDMS micro-channel was designed to have nozzle/diffuser structures which make the fluids flow from inlet to outlet when the IPMC membrane-shaped micro-actuator is deflected up and down by the applied voltages. The measured flow rate of the fabricated IPMC micro-pump was about 9.9μℓ/min at 0.5Hz when the input voltage and duty ratio were 8V P-P and 50%, respectively. The test results illustrate that the fabricated IPMC micro-pump is suitable for pumping fluid through micro-channel on a PDMS substrate. Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm2 for 120 minutes. For the application of conductive polymer actuator to a micropump, silicon bulk micromachining process has been combined.

Paper Details

Date Published: 27 July 2004
PDF: 9 pages
Proc. SPIE 5385, Smart Structures and Materials 2004: Electroactive Polymer Actuators and Devices (EAPAD), (27 July 2004); doi: 10.1117/12.539671
Show Author Affiliations
James Jungho Pak, Korea Univ. (South Korea)
Jihong Kim, Korea Univ. (South Korea)
Sang Woo Oh, Korea Univ. (South Korea)
Jee Hee Son, Korea Univ. (South Korea)
Sung Hwan Cho, Daewoo Electronics Corp. (South Korea)
Seung-Ki Lee, Dankook Univ. (South Korea)
Jong-Yeon Park, Korea Institute of Science and Technology (South Korea)
Byungkyu Kim, Korea Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 5385:
Smart Structures and Materials 2004: Electroactive Polymer Actuators and Devices (EAPAD)
Yoseph Bar-Cohen, Editor(s)

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