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Proceedings Paper

Interferometric sensor and calibration system for high-precision applications
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Paper Abstract

This paper describes the basic principle of an interferometric angle and length sensor and its application. The sensor is the main part of a compact calibration system that can be used to calibrate and test one-dimensional length measurement systems. It is built by integrating the sensor into a positioning stage and setting up a DSP-based hardware and software signal processing system. A PC-based frontend using Matlab allows for easy setup of user-specific scripts for numerous calibration tasks. The sensor's and system's capabilities have been demonstrated using a high-resolution autocollimator, an AFM and an inductive tactile probe as calibration samples. Calibrations are possible with step sizes ranging from 20pm up to ±6μm and several waveforms for dynamic calibrations at frequencies currently up to 2 kHz.

Paper Details

Date Published: 27 July 2004
PDF: 12 pages
Proc. SPIE 5384, Smart Structures and Materials 2004: Smart Sensor Technology and Measurement Systems, (27 July 2004); doi: 10.1117/12.538913
Show Author Affiliations
Matthias Welter, Technische Univ. Ilmenau (Germany)
Eberhard Manske, Technische Univ. Ilmenau (Germany)
Gerd Jaeger, Technische Univ. Ilmenau (Germany)


Published in SPIE Proceedings Vol. 5384:
Smart Structures and Materials 2004: Smart Sensor Technology and Measurement Systems
Eric Udd; Daniele Inaudi, Editor(s)

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