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Proceedings Paper

Commercialization of optical MEMS components
Author(s): Nan Zhang
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Date Published:
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Proc. SPIE 5346, MOEMS and Miniaturized Systems IV, ; doi: 10.1117/12.538397
Show Author Affiliations
Nan Zhang, MEMSCAP, Inc. (United States)


Published in SPIE Proceedings Vol. 5346:
MOEMS and Miniaturized Systems IV
Ayman El-Fatatry, Editor(s)

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