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Proceedings Paper

Fabrication of three-dimensional photonic crystals using lithographic processes
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Paper Abstract

In this paper we present lithographic-based fabrication methods for the realization of three-dimensional photonic crystals (PhCs). These methods are based on novel implementations of single and multi-step UV lithography. To this end, we begin by presenting a technique based on a multi-step process that allows for the stacking of planar photonic lattice layers that when repeated in the vertical direction serves to construct a three-dimensional PhC lattice. This process offers the unique ability to implement arbitrary defects, which thereby enables resonant cavities and embedded PhC waveguides. In addition, we also present a process based on three-dimensional interference lithography, which enables the realization of 3D photonic crystal lattices in a single lithographic step. Details of these processes and preliminary experimental results are presented.

Paper Details

Date Published: 29 December 2003
PDF: 9 pages
Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); doi: 10.1117/12.538388
Show Author Affiliations
Dennis W. Prather, Univ. of Delaware (United States)
Yao Peng, Univ. of Delaware (United States)
Garrett J. Schneider, Univ. of Delaware (United States)
Janusz Murakowski, Univ. of Delaware (United States)

Published in SPIE Proceedings Vol. 5347:
Micromachining Technology for Micro-Optics and Nano-Optics II
Eric G. Johnson; Gregory P. Nordin, Editor(s)

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