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Proceedings Paper

RF MEMS technologies fabricated using low-temperature processing
Author(s): Christopher W. Dyck; Christopher D. Nordquist; Garth M. Kraus
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Paper Abstract

Radio frequency microelectromechanical systems (RF MEMS) is an enabling technology for the miniaturization of future radar and communication systems. RF MEMS ohmic and capacitive switch performance and fabrication are discussed. Sandia National Laboratories’ program in RF MEMS is motivated by defense and national security applications not currently being met by the private sector. Examples of fabricated switches and switched circuits under investigation at Sandia are presented.

Paper Details

Date Published: 30 December 2003
PDF: 11 pages
Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); doi: 10.1117/12.538377
Show Author Affiliations
Christopher W. Dyck, Sandia National Labs. (United States)
Christopher D. Nordquist, Sandia National Labs. (United States)
Garth M. Kraus, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 5342:
Micromachining and Microfabrication Process Technology IX
Mary Ann Maher; Jerome F. Jakubczak, Editor(s)

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