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Proceedings Paper

Design and analysis of multidegrees of freedom micromirror for triangular wave scanning
Author(s): Izhak Bucher; Gal Avivi; Marko Velger
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Paper Abstract

Traditionally, miniature scanning mirrors with which raster-scan displays are designed, oscillate sinusoidally while being operated in resonance. The operation in resonance gives rise to large vibration amplitudes under a small driving force/torque and can thus be realized in MEMS scale to oscillate at 15,000 per second and beyond. Unfortunately, sinusoidal scanning creates images with highly non-uniform intensity levels. It was therefore suggested to create a resonating mirror that performs a near triangular-wave periodic motion. Presented in this paper is a closed-form synthesis procedure with which a suitable multi degrees of freedom scanning mirror can be realized. It is shown that a special topology can be used to generate many periodic oscillatory motions under low operating forces. Specifically, a large scale electromagnetically driven system and a MEMS mirror have been designed and built to demonstrate the applicability of this approach. It is shown that the necessary excitation voltage, in the electrostatically driven MEMS mirror, can be reduced from over 1000 Volt into a more realistic 40 Volt range.

Paper Details

Date Published: 26 July 2004
PDF: 11 pages
Proc. SPIE 5390, Smart Structures and Materials 2004: Smart Structures and Integrated Systems, (26 July 2004); doi: 10.1117/12.538376
Show Author Affiliations
Izhak Bucher, Technion-Israel Institute of Technology (Israel)
Gal Avivi, Technion-Israel Institute of Technology (Israel)
Marko Velger, ELOP Electro-Optics Industries, Ltd. (Israel)

Published in SPIE Proceedings Vol. 5390:
Smart Structures and Materials 2004: Smart Structures and Integrated Systems
Alison B. Flatau, Editor(s)

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