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Proceedings Paper

Micromachining with ultrashort laser pulses: from basic understanding to technical applications
Author(s): Friedrich Dausinger; Helmut Hugel; Vitali I. Konov
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Paper Abstract

Ultrashort pulses appear very promising for material removal with ultra high precision. Initial investigations showed, however, several unexpected quality problems such as formation of recast, ripples and irregular hole shapes even in the femtosecond pulse regime. After describing the problems, this contribution will present some progress in fundamental understanding of the ultrafast ablation process. On the basis of this knowledge technical means have been developed allowing to achieve an unprecedented level of accuracy at acceptable expenses. The latter being strongly influenced by the shortness of the laser pulse, a comparison between pico- and femto-second regime will be presented.

Paper Details

Date Published: 14 November 2003
PDF: 10 pages
Proc. SPIE 5147, ALT'02 International Conference on Advanced Laser Technologies, (14 November 2003); doi: 10.1117/12.537496
Show Author Affiliations
Friedrich Dausinger, Stuttgart Univ. (Germany)
Helmut Hugel, Stuttgart Univ. (Germany)
Vitali I. Konov, General Physics Institute (Russia)

Published in SPIE Proceedings Vol. 5147:
ALT'02 International Conference on Advanced Laser Technologies
Heinz P. Weber; Vitali I. Konov; Thomas Graf, Editor(s)

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