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Proceedings Paper

Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process using straight channel and Mach-Zehnder waveguides
Author(s): Yasufumi Enami; Alex K-Y. Jen; Gerald R. Meredith; Nasser Peyghambarian
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Paper Abstract

We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-micron-thick EO polymer overlayer, which reduces a half wave voltage (Vπ) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the Vπ by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the Vπ of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the Vπ further.

Paper Details

Date Published: 14 June 2004
PDF: 8 pages
Proc. SPIE 5350, Optical Components and Materials, (14 June 2004); doi: 10.1117/12.537376
Show Author Affiliations
Yasufumi Enami, Optical Sciences Ctr./Univ. of Arizona (United States)
Alex K-Y. Jen, Univ. of Washington (United States)
Gerald R. Meredith, Optical Sciences Ctr./Univ. of Arizona (United States)
Nasser Peyghambarian, Optical Sciences Ctr./Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 5350:
Optical Components and Materials
Michel J. F. Digonnet; Shibin Jiang, Editor(s)

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