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Proceedings Paper

A study on the dissolution inhibition of poly norbornene hexafluoroisopropanol in aqueous base solutions
Author(s): Medhat A. Toukhy; Joseph Oberlander; Dalil Rahman; Francis M. Houlihan
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Paper Abstract

It is confirmed that strong inhibitors must not only interact with the polymer but also are highly hydrophobic. A proportional relationship was shown between the inhibition and log P of different additives. In general, PAGs also follow this relationship, however triphenylsulfonium PAGs appear to be less effective inhibitors than bis-t-butylphenyliodonium PAGs having the same anions.

Paper Details

Date Published: 14 May 2004
PDF: 8 pages
Proc. SPIE 5376, Advances in Resist Technology and Processing XXI, (14 May 2004); doi: 10.1117/12.537077
Show Author Affiliations
Medhat A. Toukhy, Clariant Corp. (United States)
Joseph Oberlander, Clariant Corp. (United States)
Dalil Rahman, Clariant Corp. (United States)
Francis M. Houlihan, Clariant Corp. (United States)

Published in SPIE Proceedings Vol. 5376:
Advances in Resist Technology and Processing XXI
John L. Sturtevant, Editor(s)

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